Frequency adjustment machine
PLT-10,PLT-20

Crystal device manufacturing

Frequency Regulator

Brand

PFA Series

Overview

  • This equipment adjusts the frequency by removing a thin metal film of a tuning fork type quartz crystal device formed on a wafer with a laser.
  • It achieves high throughput by simultaneously measuring multiple numbers of crystal units.

Features

  • High-speed trimming operation with green laser.
  • It achieves high throughput by simultaneously measuring plurality numbers of crystal units.
  • High-speed, high-precision, and high-reliability measurement circuit adopted
  • Automatic transfer is realized by the loader/unloader.
  • Displays production management information in real time.
  • With automatic probe cleaning mechanism.

Usage examples

  • This equipment adjusts the frequency by removing a thin metal film of a tuning fork type quartz crystal device formed on a wafer with a laser.

Option support

  • Capable of increasing the number of simultaneous probing to 81 chips or more and up to 160 chips
  • Compatible with multiple types of wafer chips by replacing the dedicated jig
  • We will propose the optimum trimming conditions for your product. Please contact us.
    Ex.)   Picosecond / nanosecond laser, near infrared / green laser, etc.

Product Specifications

ITEMDETAILS
Target workpieceTuning fork type quartz crystal wafer (Model change can be handled by replacing special parts.)
Target workpiece size4-inch wafer or less
Parallel measurement capabilityNumber of simultaneous probing: 80 chips or less
Image position correctionTip position
Material supply and storageLoader: Supply wafer from magazine, unloader: Store wafer in magazine
Cycle timeApprox. 0.5 sec./pc.*Tact varies depending on the number of chips, thickness of the processed film, processing amount, and number of machining operations.
External Dimensions[With NG Chip breaking function]
W1400×D1600×H1800 mm (excluding protruding objects such as a HEPA FILTER and PATLITE)
[No NG chip breaking function]
W1000×D1500×H1750 mm (excluding protruding objects such as a HEPA FILTER, PC, and PATLITE)
OptionThe number of simultaneous probing can be increased from 81 chips to 160 chips or less.
Compatible with multiple types by replacing the dedicated jig

*Configuration and specifications of this machine are subject to partial modification without prior notice.

Installation dimensions

Related Products

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