Frequency adjustment machine
PLT-10,PLT-20

Crystal device manufacturing

Frequency Regulator

selling agency

PFA Corporation

Overview

  • This equipment adjusts the frequency by removing a thin metal film of a tuning fork type quartz crystal device formed on a wafer with a laser.
  • It achieves high throughput by simultaneously measuring multiple numbers of crystal units.

Features

  • High-speed trimming operation with green laser.
  • It achieves high throughput by simultaneously measuring plurality numbers of crystal units.
  • High-speed, high-precision, and high-reliability measurement circuit adopted
  • Automatic transfer is realized by the loader/unloader.
  • Displays production management information in real time.
  • With automatic probe cleaning mechanism.

Usage examples

  • This equipment adjusts the frequency by removing a thin metal film of a tuning fork type quartz crystal device formed on a wafer with a laser.

Option support

  • Capable of increasing the number of simultaneous probing to 81 chips or more and up to 160 chips
  • Compatible with multiple types of wafer chips that differ from the dedicated jig replacement
  • We will propose the optimum trimming conditions for your product. Please contact us.
    Ex.)   Picosecond / nanosecond laser, near infrared / green laser, etc.

Product Specifications

ITEMDETAILS
Target workpieceTuning fork type quartz crystal wafer (Model change can be handled by replacing special parts.)
Target workpiece size4-inch wafer or less
Parallel measurement capabilityNumber of simultaneous probing: 80 chips or less
Image position correctionTip position
Material supply and storageLoader: Supply wafer from magazine, unloader: Store wafer in magazine
Cycle timeApprox. 0.5 sec./pc.*Tact varies depending on the number of chips, thickness of the processed film, processing amount, and number of machining operations.
External Dimensions[With NG Chip breaking function]
W1400×D1600×H1800 mm (excluding protruding objects such as a HEPA FILTER and PATRITE)
[No NG chip breaking function]
W1000×D1500×H1750 mm (excluding protruding objects such as a HEPA FILTER, PC, and PATRITE)
OptionThe number of simultaneous probing can be increased from 81 chips to 160 chips or less.
Compatible with multiple types of jigs than exclusive use jig replacement

*Configuration and specifications of this machine are subject to partial modification without prior notice.

Installation dimensions

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