Glossary of Technical Terms/Explanation of Terms
OHT(読み方:Overhead Hoist Transport)
Abbreviation for Overhead Hoist Transport (OHT).
An unmanned automatic transfer system that holds FOUPs and other transfer items in a suspended position and runs on track rails installed in the ceiling.
The hoist mechanism (belt-driven up-and-down movement) provides direct access to each load port from above the semiconductor manufacturing system.