Glossary of Technical Terms/Explanation of Terms
MEMS( crystal oscillator/oscillator)
A crystal oscillator is an oscillator composed of a fundamental oscillation of a crystal oscillator as a source, and a MEMS oscillator is an oscillator composed of a circuit for performing temperature-correction using a Si resonator as a source and a PLL circuit for obtaining an optional frequency. For a crystal oscillator with a simple structure, MEMS oscillator has a complex structure with resonator part, PLL part, and temperature‐corrected part. This complex structure controls the performance of the oscillator.