Glossary of Technical Terms/Explanation of Terms
Load Port
A mechanism installed at the front of semiconductor manufacturing system to receive the foup supplied by AMHS/PGV/operator.
Its main functions include clamping of the FOUP, docking and undocking, and opening/closing of the FOUP door.
For this reason, it is sometimes referred to as a "FOUP opener".
There are also some types of load ports that have the ability to map wafers in the FOUP.