Glossary of Technical Terms/Explanation of Terms
EFEM（読み方：Equipment Front End Module）
Abbreviation for Equipment Front End Module (EFEM).
A device that has a mechanism for delivering FOUP on the front and delivers wafers to process equipment.
The main functions are an aligner / a robot for wafer transfer / FFU (Fan Filter Unit).
The inside of the equipment achieves high clean performance by controlling the airflow of FFU.
A device that has a mechanism for delivering FOUP on the front and delivers wafers to process equipment.
The main functions are an aligner / a robot for wafer transfer / FFU (Fan Filter Unit).
The inside of the equipment achieves high clean performance by controlling the airflow of FFU.