CAP-series | Product Information | Yamaha Robotics Holdings. | YRH Co., Ltd.｜Yamaha Robotics Holdings.

Capable of detecting particles as small as Φ2μm
One-shot inspection of FOV 10mm square
Equipment with a thoroughly clean structure
Gelstick has no device damage due to position and load control
Automatic gelstick replacement
Gel stick manufacturer's tray can be set while it is in operation
Small device size
Can also be equipped with a buffer conveyor for in-line connection

*Detection ability depends on the target workpiece and particle shape, so prior evaluation is required.
*High-resolution specifications that support detection of 0.5 to 1 μm are also under development

ITEM	DETAILS
Product Name	Micro Particle Picker
Model	CAP-series
Target product	Image sensors, glass filters, and other semiconductor products
Target product size	５×５mm～１５×１５mm
Target carrier size	Ｌ: １８６～２００ｍｍＷ: ４５～１１０ｍｍ T : ０．２～２ｍｍ
Machine tact	1.2 seconds/piece 　UPH3000 (No. of foreign objects 0 pieces/carrier) 2.1 seconds/piece　 UPH1750 (number of foreign objects 3 pieces/carrier) Tact time may be delayed depending on foreign matter condition, quantity, adhesion status, equipment setting conditions, etc.
Cleanliness standards	ISO class4 *Measurement near the carrier adsorption stage of the inspection stage
Usage environment	Temperature 25±5℃ Humidity 30-70%
Path line	950+15/-10 mm *SMEMA compliant
Utilities	Input Power Supply 1Φ　AC２００V～２２０V、２０A Air 0.5MPa、２０NL/min dry clean air Vacuum Vacuum pump is included
Physical Dimensions and Mass	Main body: width 1010 x depth 900 x height 1650 mm Buffer conveyor unit: width 470 x depth 380 x height 1210 mm *Excluding protrusions such as FFU (HEPA unit) and Signal tower

※ Configuration and specifications of this machine are subject to partial modification without prior notice.

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